Granted Patent
Utility
US 5,877,085 · App. 08/772,128
Method of manufacturing semiconductor device
Inventor:
Yoshihisa Matsubara
Patented Case
View Patent ↗
Granted: Mar 2, 1999
Filed: Dec 20, 1996
Inventor
Yoshihisa Matsubara
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.