IP Library Granted Patent US 5,877,476
Granted Patent Utility
US 5,877,476 · App. 08/722,393

Apparatus and method for mass flow control of a working fluid

Inventors: Roy M. Yabuki, Virender Jain, Richard L. Kenyon, Michael Nolan
Patented Case View Patent ↗
Granted: Mar 2, 1999 Filed: Sep 30, 1996
Inventors
Roy M. Yabuki
Virender Jain
Richard L. Kenyon
Michael Nolan
Assignee (at issue)
Parker-Hannifin Corporation

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Quick Facts
Patent No.
US 5,877,476
App. No.
08/722,393
Filed
1996-09-30
Granted
1999-03-02
Kind
A