Granted Patent
Utility
US 5,878,889 · App. 08/786,928
Semiconductor wafer carrier featuring effective reduction of airborne particles become attached to wafers
Inventor:
Takuya Koyanagi
Patented Case
View Patent ↗
Granted: Mar 9, 1999
Filed: Jan 23, 1997
Inventor
Takuya Koyanagi
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.