Granted Patent
Utility
US 5,879,461 · App. 08/049,315
Metered gas control in a substrate processing apparatus
Inventor:
Douglas R. Adams
Patented Case
View Patent ↗
Granted: Mar 9, 1999
Filed: Mar 27, 1998
Inventor
Douglas R. Adams
Assignee (at issue)
Brooks Automation GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.