Granted Patent
Utility
US 5,879,464 · App. 08/952,708
Method and device for wet-processing substrates in a vessel
Inventors:
Ludwig Denzler, Helmuth Harms-Janssen
Patented Case
View Patent ↗
Granted: Mar 9, 1999
Filed: Nov 12, 1997
Inventors
Ludwig Denzler
Helmuth Harms-Janssen
Assignee (at issue)
Steag Micro Tech GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.