Granted Patent
Utility
US 5,880,828 · App. 08/898,598
Surface defect inspection device and shading correction method therefor
Inventors:
Hisato Nakamura, Yoshio Morishige, Tetsuya Watanabe
Patented Case
View Patent ↗
Granted: Mar 9, 1999
Filed: Jul 22, 1997
Inventors
Hisato Nakamura
Yoshio Morishige
Tetsuya Watanabe
Assignee (at issue)
Hitachi Electronics Engineering Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.