IP Library › Granted Patent US 5,882,403
Granted Patent Utility
US 5,882,403 · App. 08/791,502

System for providing a controlled deposition on wafers

Inventors: Robert George Begin, Peter J. Clarke
Patented Case View Patent ↗
Granted: Mar 16, 1999 Filed: Jan 27, 1997
Inventors
Robert George Begin
Peter J. Clarke
Assignee (at issue)
Sputtered Films, Inc.

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Quick Facts
Patent No.
US 5,882,403
App. No.
08/791,502
Filed
1997-01-27
Granted
1999-03-16
Kind
A