IP Library Granted Patent US 5,882,415
Granted Patent Utility
US 5,882,415 · App. 08/725,814

Electron-beam continuous process vaporization installation for thermally high stressed substrata

Inventors: Karl Heinz Helling, Bernd Wenzel
Patented Case View Patent ↗
Granted: Mar 16, 1999 Filed: Oct 7, 1996
Inventors
Karl Heinz Helling
Bernd Wenzel
Assignee (at issue)
VON ARDENNE Anlagentechnik GmbH

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Quick Facts
Patent No.
US 5,882,415
App. No.
08/725,814
Filed
1996-10-07
Granted
1999-03-16
Kind
A