IP Library › Granted Patent US 5,882,736
Granted Patent Utility
US 5,882,736 · App. 08/914,956

palladium layers deposition process

Inventors: Ludwig Stein, Hartmut Mahlkow, Waltraud Strache
Patented Case View Patent ↗
Granted: Mar 16, 1999 Filed: Aug 20, 1997
Inventors
Ludwig Stein
Hartmut Mahlkow
Waltraud Strache
Assignee (at issue)
Atotech Deutschland GmbH

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Quick Facts
Patent No.
US 5,882,736
App. No.
08/914,956
Filed
1997-08-20
Granted
1999-03-16
Kind
A