IP Library › Granted Patent US 5,882,963
Granted Patent Utility
US 5,882,963 · App. 08/910,055

Method of manufacturing semiconductor components

Inventors: Martin Kerber, Helmut Klose, Andreas Vom Felde
Patented Case View Patent ↗
Granted: Mar 16, 1999 Filed: Aug 12, 1997
Inventors
Martin Kerber
Helmut Klose
Andreas Vom Felde
Assignee (at issue)
Siemens Aktiengesellschaft

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Quick Facts
Patent No.
US 5,882,963
App. No.
08/910,055
Filed
1997-08-12
Granted
1999-03-16
Kind
A