Granted Patent
Utility
US 5,883,060 · App. 08/108,890
Cleaning compositions for wafers used in semiconductor devices
Inventors:
Kwang-Shin Lim, Sang-Oh Park
Patented Case
View Patent ↗
Granted: Mar 16, 1999
Filed: Jul 1, 1998
Inventors
Kwang-Shin Lim
Sang-Oh Park
Assignee (at issue)
SAMSUNG DISPLAY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.