IP Library › Granted Patent US 5,885,147
Granted Patent Utility
US 5,885,147 · App. 08/854,862

Apparatus for conditioning polishing pads

Inventors: Douglas Kreager, Junedong Lee
Patented Case View Patent ↗
Granted: Mar 23, 1999 Filed: May 12, 1997
Inventors
Douglas Kreager
Junedong Lee
Assignee (at issue)
Integrated Process Equipment Corporation

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Quick Facts
Patent No.
US 5,885,147
App. No.
08/854,862
Filed
1997-05-12
Granted
1999-03-23
Kind
A