Granted Patent
Utility
US 5,885,869 · App. 08/528,183
Method for uniformly doping hemispherical grain polycrystalline silicon
Inventors:
Charles L. Turner, Randhir P. S. Thakur
Patented Case
View Patent ↗
Granted: Mar 23, 1999
Filed: Sep 14, 1995
Inventors
Charles L. Turner
Randhir P. S. Thakur
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.