IP Library › Granted Patent US 5,885,879
Granted Patent Utility
US 5,885,879 · App. 08/822,941

Thin polysilicon masking technique for improved lithography control

Inventors: Mark I. Gardner, Fred N. Hause
Patented Case View Patent ↗
Granted: Mar 23, 1999 Filed: Mar 21, 1997
Inventors
Mark I. Gardner
Fred N. Hause
Assignee (at issue)
Advanced Micro Devices, Inc.

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Quick Facts
Patent No.
US 5,885,879
App. No.
08/822,941
Filed
1997-03-21
Granted
1999-03-23
Kind
A