Granted Patent
Utility
US 5,887,014 · App. 08/915,030
Process for selecting operating range for narrow band excimer laser
Inventor:
Palash P. Das
Patented Case
View Patent ↗
Granted: Mar 23, 1999
Filed: Aug 20, 1997
Inventor
Palash P. Das
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.