IP Library Granted Patent US 5,890,598
Granted Patent Utility
US 5,890,598 · App. 08/008,323

Substrate cassette

Inventors: Manabu Hayashida, Takanobu Fukudome
Patented Case View Patent ↗
Granted: Apr 6, 1999 Filed: Jan 20, 1998
Inventors
Manabu Hayashida
Takanobu Fukudome
Assignee (at issue)
NEC CORPORATION

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Quick Facts
Patent No.
US 5,890,598
App. No.
08/008,323
Filed
1998-01-20
Granted
1999-04-06
Kind
A