Granted Patent
Utility
US 5,893,754 · App. 08/651,896
Method for chemical-mechanical planarization of stop-on-feature semiconductor wafers
Inventors:
Karl M. Robinson, Michael A. Walker
Patented Case
View Patent ↗
Granted: Apr 13, 1999
Filed: May 21, 1996
Inventors
Karl M. Robinson
Michael A. Walker
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.