Granted Patent
Utility
US 5,896,875 · App. 08/706,087
Equipment for cleaning, etching and drying semiconductor wafer and its using method
Inventor:
Kenji Yoneda
Patented Case
View Patent ↗
Granted: Apr 27, 1999
Filed: Aug 30, 1996
Inventor
Kenji Yoneda
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.