Granted Patent
Utility
US 5,897,379 · App. 08/995,112
Low temperature system and method for CVD copper removal
Inventors:
Bruce D. Ulrich, Tue Nguyen, Masato Kobayashi
Patented Case
View Patent ↗
Granted: Apr 27, 1999
Filed: Dec 19, 1997
Inventors
Bruce D. Ulrich
Tue Nguyen
Masato Kobayashi
Assignees (at issue)
Sharp Microelectronics Technology Inc.
SHARP KABUSHIKI KAISHA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.