Granted Patent
Utility
US 5,898,588 · App. 08/729,588
Method and apparatus for controlling substrate processing apparatus
Inventor:
Toru Morimoto
Patented Case
View Patent ↗
Granted: Apr 27, 1999
Filed: Oct 11, 1996
Inventor
Toru Morimoto
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.