Granted Patent
Utility
US 5,899,216 · App. 08/855,208
Apparatus for rinsing wafers in the context of a combined cleaning rinsing and drying system
Inventors:
Chad Goudie, John Natalicio, Greg Olsen, Eric Shurtliff
Patented Case
View Patent ↗
Granted: May 4, 1999
Filed: May 13, 1997
Inventors
Chad Goudie
John Natalicio
Greg Olsen
Eric Shurtliff
Assignee (at issue)
SPEEDFAM CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.