Granted Patent
Utility
US 5,900,047 · App. 08/979,426
Exhaust system for a semiconductor etcher that utilizes corrosive gas
Inventors:
Benjamin Garcia Rodriguez, Augusto James Gonzales, Robert Erich Fritz, Freddy Meyers
Patented Case
View Patent ↗
Granted: May 4, 1999
Filed: Nov 26, 1997
Inventors
Benjamin Garcia Rodriguez
Augusto James Gonzales
Robert Erich Fritz
Freddy Meyers
Assignees (at issue)
SONY GROUP CORPORATION
SONY ELECTRONICS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.