IP Library Granted Patent US 5,902,649
Granted Patent Utility
US 5,902,649 · App. 08/985,055

Vacuum treatment system for homogeneous workpiece processing

Inventors: Johann Karner, Mauro Pedrazzini, Erich Bergmann
Patented Case View Patent ↗
Granted: May 11, 1999 Filed: Dec 4, 1997
Inventors
Johann Karner
Mauro Pedrazzini
Erich Bergmann
Assignee (at issue)
Balzers Aktiengesellschaft

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Quick Facts
Patent No.
US 5,902,649
App. No.
08/985,055
Filed
1997-12-04
Granted
1999-05-11
Kind
A