Granted Patent
Utility
US 5,906,757 · App. 08/533,886
Liquid injection plasma deposition method and apparatus
Inventors:
Peter C. Kong, Arthur D. Watkins
Patented Case
View Patent ↗
Granted: May 25, 1999
Filed: Sep 26, 1995
Inventors
Peter C. Kong
Arthur D. Watkins
Assignee (at issue)
Lockheed Martin Idaho Technologies Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.