Granted Patent
Utility
US 5,906,910 · App. 09/008,257
Multi-level photoresist profile method
Inventors:
Tue Nguyen, Bruce D. Ulrich, David R. Evans
Patented Case
View Patent ↗
Granted: May 25, 1999
Filed: Jan 16, 1998
Inventors
Tue Nguyen
Bruce D. Ulrich
David R. Evans
Assignees (at issue)
SHARP KABUSHIKI KAISHA
Sharp Microelectronics Technology Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.