IP Library › Granted Patent US 5,907,781
Granted Patent Utility
US 5,907,781 · App. 09/049,517

Process for fabricating an integrated circuit with a self-aligned contact

Inventors: Hung-Sheng Chen, Unsoon Kim, Yu Sun, Chi Chang, Mark T. Ramsbey, Mark Randolph, Tatsuya Kajita, Angela T. Hui, Fei Wang, Mark S. Chang
Patented Case View Patent ↗
Granted: May 25, 1999 Filed: Mar 27, 1998
Inventors
Hung-Sheng Chen
Unsoon Kim
Yu Sun
Chi Chang
Mark T. Ramsbey
Mark Randolph
Tatsuya Kajita
Angela T. Hui
Fei Wang
Mark S. Chang
Assignees (at issue)
Advanced Micro Devices, Inc.
Fujitsu Limited
Fujitsu AMD Semiconductor Limited

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Quick Facts
Patent No.
US 5,907,781
App. No.
09/049,517
Filed
1998-03-27
Granted
1999-05-25
Kind
A