Granted Patent
Utility
US 5,909,059 · App. 08/984,214
Semiconductor device having contact plug and method for manufacturing the same
Inventors:
Hiromitsu Hada, Toru Tatsumi, Naoki Kasai, Hidemitsu Mori
Patented Case
View Patent ↗
Granted: Jun 1, 1999
Filed: Dec 3, 1997
Inventors
Hiromitsu Hada
Toru Tatsumi
Naoki Kasai
Hidemitsu Mori
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.