Granted Patent
Utility
US 5,909,276 · App. 09/050,267
Optical inspection module and method for detecting particles and defects on substrates in integrated process tools
Inventors:
Patrick Kinney, Nagaraja Rao
Patented Case
View Patent ↗
Granted: Jun 1, 1999
Filed: Mar 30, 1998
Inventors
Patrick Kinney
Nagaraja Rao
Assignee (at issue)
Microtherm LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.