IP Library Granted Patent US 5,909,281
Granted Patent Utility
US 5,909,281 · App. 08/885,419

Interferometric measurement of surfaces with diffractive optics and planar wavefront imaging

Inventor: John H. Bruning
Patented Case View Patent ↗
Granted: Jun 1, 1999 Filed: Jun 30, 1997
Inventor
John H. Bruning
Assignee (at issue)
Tropel Corporation

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Quick Facts
Patent No.
US 5,909,281
App. No.
08/885,419
Filed
1997-06-30
Granted
1999-06-01
Kind
A