Granted Patent
Utility
US 5,913,103 · App. 08/855,515
Method of detecting metal contaminants in a wet chemical using enhanced semiconductor growth phenomena
Inventor:
Chun-Ya Chen
Patented Case
View Patent ↗
Granted: Jun 15, 1999
Filed: May 13, 1997
Inventor
Chun-Ya Chen
Assignee (at issue)
Integrated Device Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.