Granted Patent
Utility
US 5,914,520 · App. 08/619,571
Micromechanical sensor device
Inventor:
Wolfgang Werner
Patented Case
View Patent ↗
Granted: Jun 22, 1999
Filed: Mar 26, 1996
Inventor
Wolfgang Werner
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.