Granted Patent
Utility
US 5,914,974 · App. 08/803,890
Method and apparatus for eliminating reflected energy due to stage mismatch in nonlinear magnetic compression modules
Inventors:
William N. Partlo, Richard L. Sandstrom, Daniel L. Birx, Richard M. Ness
Patented Case
View Patent ↗
Granted: Jun 22, 1999
Filed: Feb 21, 1997
Inventors
William N. Partlo
Richard L. Sandstrom
Daniel L. Birx
Richard M. Ness
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.