Granted Patent
Utility
US 5,916,015 · App. 08/900,479
Wafer carrier for semiconductor wafer polishing machine
Inventor:
John Natalicio
Patented Case
View Patent ↗
Granted: Jun 29, 1999
Filed: Jul 25, 1997
Inventor
John Natalicio
Assignee (at issue)
SPEEDFAM CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.