IP Library › Granted Patent US 5,916,366
Granted Patent Utility
US 5,916,366 · App. 08/944,229

Substrate spin treating apparatus

Inventors: Tsutomu Ueyama, Akira Izumi, Hideki Adachi
Patented Case View Patent ↗
Granted: Jun 29, 1999 Filed: Oct 6, 1997
Inventors
Tsutomu Ueyama
Akira Izumi
Hideki Adachi
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.

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Quick Facts
Patent No.
US 5,916,366
App. No.
08/944,229
Filed
1997-10-06
Granted
1999-06-29
Kind
A