IP Library Granted Patent US 5,916,640
Granted Patent Utility
US 5,916,640 · App. 08/706,664

Method and apparatus for controlled particle deposition on surfaces

Inventors: Benjamin Y. H. Liu, James J. Sun
Patented Case View Patent ↗
Granted: Jun 29, 1999 Filed: Sep 6, 1996
Inventors
Benjamin Y. H. Liu
James J. Sun
Assignee (at issue)
MSP CORPORATION

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Quick Facts
Patent No.
US 5,916,640
App. No.
08/706,664
Filed
1996-09-06
Granted
1999-06-29
Kind
A