Granted Patent
Utility
US 5,916,821 · App. 08/682,409
Method for producing sublithographic etching masks
Inventor:
Martin Kerber
Patented Case
View Patent ↗
Granted: Jun 29, 1999
Filed: Jul 17, 1996
Inventor
Martin Kerber
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.