Granted Patent
Utility
US 5,918,150 · App. 08/729,567
Method for a chemical vapor deposition of copper on an ion prepared conductive surface
Inventors:
Tue Nguyen, Jer-Shen Maa
Patented Case
View Patent ↗
Granted: Jun 29, 1999
Filed: Oct 11, 1996
Inventors
Tue Nguyen
Jer-Shen Maa
Assignees (at issue)
Sharp Microelectronics Technology Inc.
SHARP KABUSHIKI KAISHA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.