Granted Patent
Utility
US 5,920,013 · App. 08/797,376
Silicon micromachine with sacrificial pedestal
Inventors:
William J. Boardman, John Crumlin, John Ralph Lindsey, Paul Thomas Carson, Judd Steven Carper, John Carlson Ames, Paul E. Stevenson
Patented Case
View Patent ↗
Granted: Jul 6, 1999
Filed: Feb 7, 1997
Inventors
William J. Boardman
John Crumlin
John Ralph Lindsey
Paul Thomas Carson
Judd Steven Carper
John Carlson Ames
Paul E. Stevenson
Assignee (at issue)
Ford Motor Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.