Granted Patent
Utility
US 5,920,108 · App. 08/745,104
Late process method and apparatus for trench isolation
Inventors:
Donald F. Hemmenway, Lawrence G. Pearce
Patented Case
View Patent ↗
Granted: Jul 6, 1999
Filed: Nov 7, 1996
Inventors
Donald F. Hemmenway
Lawrence G. Pearce
Assignee (at issue)
HARRIS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.