Granted Patent
Utility
US 5,920,487 · App. 08/810,561
Two dimensional lithographic proximity correction using DRC shape functions
Inventors:
Alfred J. Reich, Warren D. Grobman, Bernard J. Roman, Kevin Lucas, Clyde Browning, Michael E. Kling
Patented Case
View Patent ↗
Granted: Jul 6, 1999
Filed: Mar 3, 1997
Inventors
Alfred J. Reich
Warren D. Grobman
Bernard J. Roman
Kevin Lucas
Clyde Browning
Michael E. Kling
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.