Granted Patent
Utility
US 5,921,849 · App. 08/868,878
Method and apparatus for distributing a polishing agent onto a polishing element
Inventors:
Inki Kim, Lawrence Vondra
Patented Case
View Patent ↗
Granted: Jul 13, 1999
Filed: Jun 4, 1997
Inventors
Inki Kim
Lawrence Vondra
Assignee (at issue)
SPEEDFAM CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.