Granted Patent
Utility
US 5,925,213 · App. 08/938,807
Wet processing apparatus with movable partitioning plate between two processing chambers
Inventor:
Shinya Yamasaki
Patented Case
View Patent ↗
Granted: Jul 20, 1999
Filed: Sep 26, 1997
Inventor
Shinya Yamasaki
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.