Granted Patent
Utility
US 5,925,232 · App. 08/761,563
Method and apparatus for constant composition delivery of hydride gases for semiconductor processing
Inventor:
William M. Ayers
Patented Case
View Patent ↗
Granted: Jul 20, 1999
Filed: Dec 6, 1996
Inventor
William M. Ayers
Assignee (at issue)
Electron Transfer Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.