Granted Patent
Utility
US 5,925,918 · App. 08/902,808
Gate stack with improved sidewall integrity
Inventors:
Zhiqiang Wu, Pai-Hung Pan
Patented Case
View Patent ↗
Granted: Jul 20, 1999
Filed: Jul 30, 1997
Inventors
Zhiqiang Wu
Pai-Hung Pan
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.