Granted Patent
Utility
US 5,927,263 · App. 08/966,060
Method for manufacturing completely circular semiconductor wafers
Inventor:
Satoru Muramatsu
Patented Case
View Patent ↗
Granted: Jul 27, 1999
Filed: Nov 7, 1997
Inventor
Satoru Muramatsu
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.