Granted Patent
Utility
US 5,929,504 · App. 09/097,664
Semiconductor device with trench isolation structure and fabrication method thereof
Inventors:
Toru Mogami, Takashi Ogura
Patented Case
View Patent ↗
Granted: Jul 27, 1999
Filed: Jun 16, 1998
Inventors
Toru Mogami
Takashi Ogura
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.