IP Library Granted Patent US 5,930,106
Granted Patent Utility
US 5,930,106 · App. 08/678,729

DRAM capacitors made from silicon-germanium and electrode-limited conduction dielectric films

Inventors: Scott DeBoer, Klaus Schuegraf, Ronald A. Weimer, Randhir P. S. Thakur
Patented Case View Patent ↗
Granted: Jul 27, 1999 Filed: Jul 11, 1996
Inventors
Scott DeBoer
Klaus Schuegraf
Ronald A. Weimer
Randhir P. S. Thakur
Assignee (at issue)
Micron Technology, Inc.

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Quick Facts
Patent No.
US 5,930,106
App. No.
08/678,729
Filed
1996-07-11
Granted
1999-07-27
Kind
A