Granted Patent
Utility
US 5,930,106 · App. 08/678,729
DRAM capacitors made from silicon-germanium and electrode-limited conduction dielectric films
Inventors:
Scott DeBoer, Klaus Schuegraf, Ronald A. Weimer, Randhir P. S. Thakur
Patented Case
View Patent ↗
Granted: Jul 27, 1999
Filed: Jul 11, 1996
Inventors
Scott DeBoer
Klaus Schuegraf
Ronald A. Weimer
Randhir P. S. Thakur
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.