Granted Patent
Utility
US 5,930,596 · App. 08/721,980
Semiconductor component for vertical integration and manufacturing method
Inventors:
Helmut Klose, Werner Weber, Emmerich Bertagnolli, Siegmar Koppe, Holger Hubner
Patented Case
View Patent ↗
Granted: Jul 27, 1999
Filed: Sep 27, 1996
Inventors
Helmut Klose
Werner Weber
Emmerich Bertagnolli
Siegmar Koppe
Holger Hubner
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.