Granted Patent
Utility
US 5,930,657 · App. 08/731,751
Method of depositing an amorphous silicon film by APCVD
Inventors:
Jeong Hyun Kim, Eui Yeol Oh
Patented Case
View Patent ↗
Granted: Jul 27, 1999
Filed: Oct 18, 1996
Inventors
Jeong Hyun Kim
Eui Yeol Oh
Assignee (at issue)
Goldstar Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.