IP Library Granted Patent US 5,930,675
Granted Patent Utility
US 5,930,675 · App. 08/632,908

Process of forming inter-level connection without increase of contact resistance

Inventor: Hiromitsu Hada
Patented Case View Patent ↗
Granted: Jul 27, 1999 Filed: Apr 16, 1996
Inventor
Hiromitsu Hada
Assignee (at issue)
NEC CORPORATION

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Quick Facts
Patent No.
US 5,930,675
App. No.
08/632,908
Filed
1996-04-16
Granted
1999-07-27
Kind
A